The conference brings together engineers and scientists from all over the world to discuss recent progress and future trends in the fabrication and application of micro- and nanostructures and devices. Applications in electronics, photonics, electromechanics, energy, mobility, environment, life sciences, and biology are also discussed.

The topics are:

A. Micro- and Nanopatterning

  1. Photon lithography
    • DUV, EUV, immersion, sources, optics, mask technology, alignment, optical proximity correction, modelling, throughput, double exposure
  2. Mask technology
  3. Electron and ion beam lithography
    • sources, optics, systems, alignment, proximity corrections, modelling, ion and electron beam – surface interactions, direct writer
  4. Soft lithography: imprint, micro-contact
    • stamp and its fabrication, systems, processes and imprinting methods, demoulding, throughput, modelling, alignment, overlay, damage, surface functionalization
  5. Materials for micro- and nanolithography
    • resists for optical, e-beam, ion-beam and soft lithography, resist processing, resist structure, modelling
  6. Directed self assembly
    • modelling, self-alignment, block copolymers
  7. Tip-based / scanning probe based patterning techniques
    • mechanical modifications, thermal interactions, optical near-field, fluid-writing, nano-manipulation
  8. Stencil based patterning
  9. Novel techniques
    • combination top-down bottom-up

B. Micro- and Nanofabrication

  1. Pattern transfer
    • lift-off, new materials, sputtering, milling
  2. Plasma etching
    • nanoscale etching, etching of new materials, deep etching, directional (lateral) etching
  3. E- and ion-beam induced deposition
    • deposition, etching, modelling
  4. 3D nanomanufacturing
    • integration of nano-objects, scale up and transfer to manufacturing
  5. 3D microprinting
    • printing/deposition of nanoparticles, -tubes, -rods, rapid prototyping
  6. Inspection and process diagnostics and control
    • (in-line) testing, (nano-) metrology, x-ray analyses, sample preparation for inspection, in-situ process measurements
  7. (Nano-) metrology
    • dimensions, mechanical properties, electronic properties
  8. Self-aligned processes
    • alignment, overlay, modelling

C. Micro/Nano Devices and Systems

  1. MEMS / NEMS
    • RF-MEMS, MOEMS, surface micromachining, bulk micromachining, time-keeping devices, energy harvesting
  2. Micro and nano fluidic systems
    • fluidic elements and their fabrication/integration
  3. Metamaterials and their fabrication
  4. Heterogeneous integration
    • advanced materials, key enabling technologies, back-end-of-line
  5. System design
  6. Device and system modelling
  7. Micro/Nano devices for physical science
    • nanoelectronics, single electron transistor devices, quantum computer, plasmonic devices
  8. Data storage
    • magnetic devices, optical storage
  9. Assembling and packaging technologies
    • materials, testing, reliability, modelling
  10. Reliability
  11. Applications
    • in energy, automobile, traffic, sensors, RFID, building, …

D. Micro- and Nanotechnology/engineering for Life Sciences and Biology

  1. Sensing
    • (bio-) chemical sensing, materials, transduction, in-vivo sensing
  2. Lab-on-a-Chip
    • integration, fabrication, application, µ-TAS, proteomics, cell-omics
  3. Organ-on-a-Chip
    • interfaces, culturing, sensing/observation, applications
  4. Micro/Nanofluidics for bio/life sciences
    • fluidic elements, contamination, clogging, sorting
  5. System design and fabrication
    • incl. modelling and simulation
  6. Applications
    • point-of-care devices, Lab-on-a-Chip, diagnostics, theranostics

As in previous years, all presenters will be kindly asked to publish their contribution in the four special issues to appear after peer-reviewing in the Journal of Microelectronic Engineering.